Description
Honeywell MIDAS Sensor Cartridge for Silane (SiH4) 0.18-2 ppm (Low Level)
Several Honeywell MIDAS® cartridges can be configured to read a number of different gases based on a common chemical family. Actual details for the sensor detection range are included in the sensor cartridge specification sheet and the MIDAS® technical manual. MIDAS® sensor cartridges can be ordered as part of a Kit with the universal MIDAS® transmitter, or as a replacement part. The detectable range is listed. With the exception of O2 (where ambient concentration is typically 20.9%), the sensors will display zero when no gas is present. All Cartridges with the format MIDAS-E-XXX are supplied with a 2 year (24 month) warranty.
| Gas Measured | Phosphorous Oxychloride (SiH4) | |
|---|---|---|
| Cartridge Part Number | MIDAS-E-SHL | 2 year extended warranty |
| Sensor Technology | 3 electrode electrochemical cell | |
| Measuring Range (ppm) | SiH4 | 0 – 2 ppm |
| Minimum Alarm 1 Set Point | 0.24 ppm | |
| Repeatability | < ± 5% of measured value | |
| Linearity | < ± 10% of measured value | |
| Response Time t62.5 | < 3 seconds | |
| Sensor Cartridge Life Expectancy | ≥ 24 months under typical application conditions | |
| Operating Temperature | 0°C to +40°C (32°F to 104°F) | |
| Effect of Temperature | < ± 0.0017ppm / °C (0°C to 20°C) | |
| Zero | < ± 0.006ppm / °C (20°C to 40°C) | |
| Sensitivity | < ± 1% of measured value / ºC | |
| Operating Humidity (continuous) | 15 – 90% rH | |
| Effect of Humidity | Zero | < 0.0014ppm / % rH |
| Sensitivity | < ± 2% of measured value / % rH | |
| Operating Pressure | 90 – 110kPa | |
| Effect of Position | No effect in typical application | |
| Long Term Drift | Zero | TBA |
| Sensitivity | < ± 10% of measured value / year | |
| Calibration Gas | Silane (SiH4) | |
| Challenge Gas (Bump Test) | Hydrogen Sulfide (H2S) | |
| Warm Up Time | < 20 minutes | |
| Storage Temperature | +5°C to +25°C (+41°F to +77°F) | |
Each Midas sensor is potentially cross sensitive to other gases and this may cause a gas reading when exposed to other gases than those originally designated. The table below presents typical readings that will be observed when a new sensor cartridge is exposed to the cross sensitive gas (or a mixture of gases containing the cross sensitive species).
| Gas / Vapor | Chemical Formula | Concentration Applied (ppm) | Reading (ppm SiH4) |
|---|---|---|---|
| Ammonia | NH3 | 100 | 0 |
| Arsine | AsH3 | 1 | 1 |
| Carbon Monoxide | CO | 2000 | 0.1 |
| Chlorine | Cl2 | 5 | -0.6 |
| Diborane | B2H6 | 1 | 0.7 |
| Ethanol | C2H5OH | 500 | 0 |
| Hydrogen | H2 | 5000 | Max 0.2, Avg 0.1 |
| Hydrogen Chloride | HCl | 8.7 | 1.6 |
| Hydrogen Fluoride | HF | 10 | 0 |
| Hydrogen Sulfide | H2S | 5 | 1.8 |
| Iso Propanol | C3H7OH | 500 | 0 |
| Nitrogen Dioxide | NO2 | 50 | -11 |
| Phosphine | PH3 | 1 | 1.4 |
| Sulfur Dioxide | SO2 | 50 | 1.4 |

