Subtotal: $595.00
Sensor, Silane (SiH4), 0-15 ppm, sensor/amp unit for GD-70D (no H2 response)
$495.00
Description
GD-70D ESU Sensor
| ESU Gas Detected | Detection Range | Alarm 1 | Alarm 2 | Increments | Part # |
|---|---|---|---|---|---|
| NH3 (Ammonia) | 0 - 75.0 ppm | 25.0 ppm | 50.0 ppm | 0.5 ppm | GD-70D-NH3 |
| AsH3 (Arsine) | 0 - 0.20 ppm | 0.05 ppm | 0.10 ppm | 0.001 ppm | GD-70D4A-ASH3 |
| BCl3 (Boron trichloride) | 0 - 15.0 ppm | 5.00 ppm | 10.0 ppm | 0.1 ppm | GD-70D-BCl3 |
| Br2 (Bromine) | 0 - 1.00 ppm | 0.30 ppm | 0.60 ppm | 0.01 ppm | GD-70D-BR2 |
| CO (Carbon monoxide) | 0 - 75.0 ppm | 25.0 ppm | 50.0 ppm | 0.5 ppm | GD-70D-CO-02 |
| 0 - 75.0 ppm | 25.0 ppm | 50.0 ppm | 0.5 ppm | GD-70D-CO-12 | |
| 0 - 150 ppm | 50.0 ppm | 100 ppm | 1 ppm | GD-70D-CO-01 | |
| 0 - 150 ppm | 50.0 ppm | 100 ppm | 1 ppm | GD-70D-CO-11 | |
| 0 - 300 ppm | 100 ppm | 200 ppm | 2 ppm | GD-70D-CO-03 | |
| 0 - 300 ppm | 100 ppm | 200 ppm | 2 ppm | GD-70D-CO-13 | |
| Cl2 (Chlorine) | 0 - 3.00 ppm | 1.00 ppm | 2.00 ppm | 0.02 ppm | GD-70D-Cl2 |
| ClF3 (Chlorine trifluoride) | 0 - 0.60 ppm | 0.20 ppm | 0.40 ppm | 0.005 ppm | GD-70D-ClF3-A |
| B2H6 (Diborane) | 0 - 0.30 ppm | 0.10 ppm | 0.20 ppm | 0.002 ppm | GD-70D-B2H6 |
| H2Cl2Si (Dichlorosilane) | 0 - 15.0 ppm | 5.00 ppm | 10.0 ppm | 0.1 ppm | GD-70D-DCS |
| Si2H6 (Disilane) | 0 - 15.0 ppm | 5.0 ppm | 10.0 ppm | 0.1 ppm | GD-70D-Si2H6 |
| DMA (Dimethylamine) | 0 - 15.0 ppm | 5.0 ppm | 10.0 ppm | 0.1 ppm | GD-70D-DMA |
| DEA (Diethylamine) | 0 - 15.0 ppm | 5.0 ppm | 10.0 ppm | 0.1 ppm | GD-70D-DEA |
| F2 (Fluorine) | 0 - 3.00 ppm | 1.00 ppm | 2.00 ppm | 0.02 ppm | GD-70D-F2 |
| GeH4 (Germane) | 0 - 0.80 ppm | 0.20 ppm | 0.40 ppm | 0.005 ppm | GD-70D-GeH4 |
| HBR (Hydrogen bromide) | 0 - 6.00 ppm | 2.00 ppm | 4.00 ppm | 0.05 ppm | GD-70D-HBR-06 |
| 0 - 9.00 ppm | 3.00 ppm | 6.00 ppm | 0.05 ppm | GD-70D-HBR-09 | |
| HCl (Hydrogen chloride) | 0 - 6.00 ppm | 2.00 ppm | 4.00 ppm | 0.05 ppm | GD-70D-HCL-06E |
| 0 - 15.0 ppm | 5.0 ppm | 10.0 ppm | 0.1 ppm | GD-70D-HCL-15E | |
| HCN (Hydrogen cyanide) | 0.9 - 15.0 ppm | 4.0 ppm | 10.0 ppm | 0.1 ppm | GD-70D-HCN |
| HF (Hydrogen fluoride) | 0.4 - 3.00 ppm | 1.00 ppm | 2.00 ppm | 0.02 ppm | GD-70D-HF-03 |
| 0.4 - 9.00 ppm | 3.00 ppm | 6.00 ppm | 0.05 ppm | GD-70D-HF-09 | |
| H2O2 (Hydrogen peroxide) | 0 - 3.00 ppm | 1.00 ppm | 2.00 ppm | 0.02 ppm | GD-70D-H2O2 |
| H2Se (Hydrogen selenide) | 0 - 0.20 ppm | 0.05 ppm | 0.10 ppm | 0.001 ppm | GD-70D-H2Se |
| H2S (Hydrogen sulfide) | 0 - 1.00 ppm | 0.30 ppm | 0.60 ppm | 0.01 ppm | GD-70D-H2S-01 |
| 0 - 30.0 ppm | 10.0 ppm | 20.0 ppm | 0.2 ppm | GD-70D-H2S-30 | |
| CH3NH2 (Methylamine) | 0 - 15.0 ppm | 5.00 ppm | 10.0 ppm | 0.1 ppm | GD-70D-CH3NH2 |
| NO (Nitric oxide) | 0 - 100 ppm | 5 ppm | 10 ppm | 1 ppm | GD-70D-NO |
| NO2 (Nitrogen dioxide) | 0 - 9.00 ppm | 3.00 ppm | 6.00 ppm | 0.05 ppm | GD-70D-NO2-09 |
| 0 - 15.0 ppm | 5.0 ppm | 10.0 ppm | 0.1 ppm | GD-70D-NO2-15 | |
| N2O4 (Nitrogen Tetraoxide) | 0 - 15.0 ppm | GD-70D-N2O4 | |||
| NF3 (Nitrogen trifluoride) | 0 - 30.0 ppm | 10.0 ppm | 20.0 ppm | 0.2 ppm | GD-70DP-NF3 |
| O3 (Ozone) | 0 - 0.60 ppm | 0.20 ppm | 0.40 ppm | 0.005 ppm | GD-70D-O3 |
| PH3 (Phosphine) | 0 - 1.00 ppm | 0.30 ppm | 0.60 ppm | 0.01 ppm | GD-70D-PH3-AH |
| 0 - 1.00 ppm | 0.30 ppm | 0.60 ppm | 0.01 ppm | GD-70D-PH3-DH | |
| SiH4 (Silane) | 0 - 15.0 ppm | 5.0 ppm | 10.0 ppm | 0.1 ppm | GD-70D-SiH4-AH |
| 0 - 15.0 ppm | 5.0 ppm | 10.0 ppm | 0.1 ppm | GD-70D-SiH4-DH | |
| SiCl4 (Silicon tetrachloride) | 0 - 15.0 ppm | 5.0 ppm | 10.0 ppm | 0.1 ppm | GD-70D-SiCl4 |
| SO2 (Sulfur dioxide) | 0 - 6.00 ppm | 2.00 ppm | 4.00 ppm | 0.05 ppm | GD-70D-SO2 |
| TEOS (Tetraethyl orthosilicate) | 0 - 15.0 ppm | 10.0 ppm | 10.0 ppm | 0.1 ppm | GD-70DP-TEOS |
| TMA (Trimethylamine) | 0 - 15.0 ppm | 5.0 ppm | 10.0 ppm | 0.1 ppm | GD-70D-TMA |
| ESU | ESU + PLU *1 | SSU + PLU *1 | NCU | SGU | |
|---|---|---|---|---|---|
| Detection principle | Electrochemical type | Pyrolysis-particle type | New ceramic (Catalytic combustion) | Semiconductor | |
| Gas to be detected | Refer to list of detectable gases | NF3/COS | 0-15ppm TEOS in air and others | Combustible gas | Combustible gas |
| Toxic gas | |||||
| Detection range | See Detection Gas chart | ||||
| Detection method | Pump suction type | Pump suction type/pyrolysis type | Pump suction type | ||
| Alarm setpoint value | See Detection Gas chart | ||||
| Alarm accuracy | Within ±30% to the alarm setpoint value | ±25% to the alarm setpoint value | Combustible: ±25% to the alarm setpoint value | ||
| Toxic: ±30% to the alarm setpoint value | |||||
| Alarm delay time | 60 seconds or less by providing the gas 1.6 times the alarm setpoint (excluding delay in the tube and in the communication) | 30 seconds or less by providing the gas 1.6 times the alarm setpoint (excluding delay in the tube and in the communication) | Combustible: 30 seconds or less by providing the gas 1.6 times the alarm setpoint (excluding delay in the tube and in the communication) | ||
| Toxic: 60 seconds or less by providing the gas 1.6 times the alarm setpoint (excluding delay in the tube and in the communication) | |||||
| Alarm type | Two-step alarm (H-HH) | ||||
| Power consumption | Approx. 1.5 W (Max. 4 W) | Approx. 3W (Max. 5.5W) | Approx. 2.5W (Max. 5W) | ||
| Power consumption (EA) | 24 V: Approx. 3W (Max. approx. 5W) | 24 V: Approx. 4.5W (Max. approx. 6.5W) | 24 V: Approx. 4W (Max. approx. 6W) | ||
| PoE: Approx. 4.5W (Max. approx. 7W) | PoE: Approx. 5.5W (Max. approx. 8.5W) | PoE: Approx. 5.5W (Max. approx. 7W) | |||
| Power consumption (DV) | Approx. 2 W (Max. 4.5 W) | Approx. 3.5W (Max. 6W) | Approx. 3W (Max. 5.5W) | ||
| Operating temperature (at a constant condition) | 0 - 40ºC | 0 - 40ºC | 0 - 40ºC | 0 - 40ºC | 0 - 40ºC |
| Operating humidities (Non-condensing) | 30 - 70%RH | 30 - 80%RH | 95%RH or less | ||
| Self diagnosis function | Sensor trouble, system failure | ||||
| Date logging function | Event history, alarm history, calibration history, Alarm trend (60 sec. before/after 1st alarm) | ||||
Additional information
| Weight | 1 lbs |
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