Sensor, Trisilylamine (Si3H9N), 0-15.0 ppm for GD-70D

$495.00

Description

GD-70D ESU Sensor

ESU Gas DetectedDetection RangeAlarm 1Alarm 2IncrementsPart #
NH3 (Ammonia)0 - 75.0 ppm25.0 ppm50.0 ppm0.5 ppmGD-70D-NH3
AsH3 (Arsine)0 - 0.20 ppm0.05 ppm0.10 ppm0.001 ppmGD-70D4A-ASH3
BCl3 (Boron trichloride)0 - 15.0 ppm5.00 ppm10.0 ppm0.1 ppmGD-70D-BCl3
Br2 (Bromine)0 - 1.00 ppm0.30 ppm0.60 ppm0.01 ppmGD-70D-BR2
CO (Carbon monoxide)0 - 75.0 ppm 25.0 ppm50.0 ppm0.5 ppmGD-70D-CO-02
0 - 75.0 ppm25.0 ppm50.0 ppm0.5 ppmGD-70D-CO-12
0 - 150 ppm50.0 ppm100 ppm1 ppmGD-70D-CO-01
0 - 150 ppm50.0 ppm100 ppm1 ppmGD-70D-CO-11
0 - 300 ppm100 ppm200 ppm2 ppmGD-70D-CO-03
0 - 300 ppm100 ppm200 ppm2 ppmGD-70D-CO-13
Cl2 (Chlorine)0 - 3.00 ppm1.00 ppm2.00 ppm0.02 ppmGD-70D-Cl2
ClF3 (Chlorine trifluoride)0 - 0.60 ppm0.20 ppm0.40 ppm0.005 ppmGD-70D-ClF3-A
B2H6 (Diborane)0 - 0.30 ppm0.10 ppm0.20 ppm0.002 ppmGD-70D-B2H6
H2Cl2Si (Dichlorosilane)0 - 15.0 ppm5.00 ppm10.0 ppm0.1 ppmGD-70D-DCS
Si2H6 (Disilane)0 - 15.0 ppm5.0 ppm10.0 ppm0.1 ppmGD-70D-Si2H6
DMA (Dimethylamine)0 - 15.0 ppm5.0 ppm10.0 ppm0.1 ppmGD-70D-DMA
DEA (Diethylamine)0 - 15.0 ppm5.0 ppm10.0 ppm0.1 ppmGD-70D-DEA
F2 (Fluorine)0 - 3.00 ppm1.00 ppm2.00 ppm0.02 ppmGD-70D-F2
GeH4 (Germane)0 - 0.80 ppm0.20 ppm0.40 ppm0.005 ppmGD-70D-GeH4
HBR (Hydrogen bromide)0 - 6.00 ppm2.00 ppm4.00 ppm0.05 ppmGD-70D-HBR-06
0 - 9.00 ppm3.00 ppm6.00 ppm0.05 ppmGD-70D-HBR-09
HCl (Hydrogen chloride)0 - 6.00 ppm2.00 ppm4.00 ppm0.05 ppmGD-70D-HCL-06E
0 - 15.0 ppm5.0 ppm10.0 ppm0.1 ppmGD-70D-HCL-15E
HCN (Hydrogen cyanide)0.9 - 15.0 ppm4.0 ppm10.0 ppm0.1 ppmGD-70D-HCN
HF (Hydrogen fluoride)0.4 - 3.00 ppm1.00 ppm2.00 ppm0.02 ppmGD-70D-HF-03
0.4 - 9.00 ppm3.00 ppm6.00 ppm0.05 ppmGD-70D-HF-09
H2O2 (Hydrogen peroxide)0 - 3.00 ppm1.00 ppm2.00 ppm0.02 ppmGD-70D-H2O2
H2Se (Hydrogen selenide)0 - 0.20 ppm0.05 ppm0.10 ppm0.001 ppmGD-70D-H2Se
H2S (Hydrogen sulfide)0 - 1.00 ppm0.30 ppm0.60 ppm0.01 ppmGD-70D-H2S-01
0 - 30.0 ppm10.0 ppm20.0 ppm0.2 ppmGD-70D-H2S-30
CH3NH2 (Methylamine)0 - 15.0 ppm5.00 ppm10.0 ppm0.1 ppmGD-70D-CH3NH2
NO (Nitric oxide)0 - 100 ppm5 ppm10 ppm1 ppmGD-70D-NO
NO2 (Nitrogen dioxide)0 - 9.00 ppm3.00 ppm6.00 ppm0.05 ppmGD-70D-NO2-09
0 - 15.0 ppm5.0 ppm10.0 ppm0.1 ppmGD-70D-NO2-15
N2O4 (Nitrogen Tetraoxide)0 - 15.0 ppmGD-70D-N2O4
NF3 (Nitrogen trifluoride)0 - 30.0 ppm10.0 ppm20.0 ppm0.2 ppmGD-70DP-NF3
O3 (Ozone)0 - 0.60 ppm0.20 ppm0.40 ppm0.005 ppmGD-70D-O3
PH3 (Phosphine)0 - 1.00 ppm0.30 ppm0.60 ppm0.01 ppmGD-70D-PH3-AH
0 - 1.00 ppm0.30 ppm0.60 ppm0.01 ppmGD-70D-PH3-DH
SiH4 (Silane)0 - 15.0 ppm5.0 ppm10.0 ppm0.1 ppmGD-70D-SiH4-AH
0 - 15.0 ppm5.0 ppm10.0 ppm0.1 ppmGD-70D-SiH4-DH
SiCl4 (Silicon tetrachloride)0 - 15.0 ppm5.0 ppm10.0 ppm0.1 ppmGD-70D-SiCl4
SO2 (Sulfur dioxide)0 - 6.00 ppm2.00 ppm4.00 ppm0.05 ppmGD-70D-SO2
TEOS (Tetraethyl
orthosilicate)
0 - 15.0 ppm10.0 ppm10.0 ppm0.1 ppmGD-70DP-TEOS
TMA (Trimethylamine)0 - 15.0 ppm5.0 ppm10.0 ppm0.1 ppmGD-70D-TMA
ESUESU + PLU *1SSU + PLU *1NCUSGU
Detection principleElectrochemical typePyrolysis-particle typeNew ceramic (Catalytic combustion)Semiconductor
Gas to be detectedRefer to list of
detectable gases
NF3/COS0-15ppm TEOS in air and othersCombustible gasCombustible gas
Toxic gas
Detection rangeSee Detection Gas chart
Detection methodPump suction typePump suction type/pyrolysis typePump suction type
Alarm setpoint valueSee Detection Gas chart
Alarm accuracyWithin ±30% to the alarm setpoint value±25% to the alarm setpoint valueCombustible: ±25% to the alarm setpoint value
Toxic: ±30% to the alarm setpoint value
Alarm delay time60 seconds or less by providing the gas 1.6 times the alarm setpoint (excluding delay in the tube and in the communication)30 seconds or less by providing the gas 1.6 times the alarm setpoint (excluding delay in the tube and in the communication)Combustible: 30 seconds or less by providing the gas 1.6 times the alarm setpoint (excluding delay in the tube and in the communication)
Toxic: 60 seconds or less by providing the gas 1.6 times the alarm setpoint (excluding delay in the tube and in the communication)
Alarm typeTwo-step alarm (H-HH)
Power consumption Approx. 1.5 W (Max. 4 W)Approx. 3W (Max. 5.5W)Approx. 2.5W (Max. 5W)
Power
consumption (EA)
24 V: Approx. 3W (Max. approx. 5W)24 V: Approx. 4.5W (Max. approx. 6.5W)24 V: Approx. 4W (Max. approx. 6W)
PoE: Approx. 4.5W (Max. approx. 7W)PoE: Approx. 5.5W (Max. approx. 8.5W)PoE: Approx. 5.5W (Max. approx. 7W)
Power
consumption (DV)
Approx. 2 W (Max. 4.5 W)Approx. 3.5W (Max. 6W)Approx. 3W (Max. 5.5W)
Operating temperature (at a constant condition)0 - 40ºC0 - 40ºC0 - 40ºC0 - 40ºC0 - 40ºC
Operating humidities (Non-condensing)30 - 70%RH30 - 80%RH95%RH or less
Self diagnosis functionSensor trouble, system failure
Date logging functionEvent history, alarm history, calibration history, Alarm trend (60 sec. before/after 1st alarm)

Additional information

Weight 1 lbs